Comprehensive Exhaust‑gas Treatment (DPF+SCR) for Diesel Generator Sets in the Semiconductor Industry
Technical introduction
Exhaust Gas Treatment Project for Standby Diesel Generator Set in a Semiconductor Plant, Shanghai
Treatment Technology: DPF+SCR System
Generator: Cummins KTA50-G16A
Green Valley Equipment Model: GRVNES50-TX-16 & GRVNES50-CYJ-16-L
NOₓ: 3147 mg/Nm³ down to 200 mg/Nm³
Soot: <200 mg/Nm³ down to 30 mg/Nm³
The integrated DPF+SCR system realizes simultaneous removal of particulate matter and NOₓ. Customized for semiconductor plant standby generator rooms, it meets strict emission standards and ensures stable & safe operation of the chip manufacturing site.
Technical advantages
1、Excellent Purification Performance:Combined DPF+SCR technology realizes effective reduction of both NOₓ and soot, satisfying strict emission standards for semiconductor plants
2、Convenient & Cost‑saving Retrofit:Compact structure fits generator‑room layout. Major modification of existing facilities is avoided to shorten construction period and cut costs.
3、Good Working‑condition Adaptability:Optimized for intermittent and emergency start‑stop of standby generators, ensuring safe emergency power supply while meeting emission requirements.
4、Stable System Operation:High‑integrated complete‑set design ensures good compatibility between DPF and SCR units, avoiding separate‑component matching risks for long‑term reliable performance.









